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发明公开
CN104297919A 反射镜驱动装置及其驱动方法 无效 - 驳回

反射镜驱动装置及其驱动方法
摘要：
一种反射镜驱动装置及其驱动方法，能够提高位移效率，且在设置有传感器部的情况下，也能够获得足够大的位移角。夹着用于支撑反射镜部(2)的反射镜支撑部(4)而在两侧配置第一促动器部(11)及第二促动器部(22)。第一促动器部(11)和第二促动器部(22)的上部电极和下部电极对应于共振模式振动的压电体内的主应力的应力分布而被分割，与第一上部电极部(111)及第三上部电极部(221)的位置相对应的压电体部分和与第二上部电极部(112)及第四上部电极部(222)的位置相对应的压电体部分产生相互逆向的应力。下部电极也同样被分割，能够向基于分割配置的不同压电体部分的上部电极部和下部电极部施加同相位的驱动电压。
摘要（英）：

In a mirror drive device, a first and second actuator sections are arranged on both sides of a mirror supporting section that supports a mirror section so as to sandwich the mirror supporting section. Division of an upper and lower electrodes of each of the first and second actuator sections is performed correspondingly to stress distribution of principal stresses in a piezoelectric body in resonant mode vibration, and a piezoelectric body portion corresponding to positions of a first and third upper electrode sections, and a piezoelectric body portion corresponding to positions of a second and fourth upper electrode sections have stresses in opposite directions to each other. Division of the lower electrodes is performed similar to the upper electrodes, and drive voltages having the same phase can be respectively applied to the upper and lower electrode sections of the piezoelectric body portions that are different due to a division arrangement.

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