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发明公开
CN104347369A 激光照射装置 有权

激光照射装置
摘要：
本发明提供了激光照射装置。该激光照射装置包括：激光束生成器，配置为生成激光束；狭缝单元，配置为选择性地透过激光束；镜单元，配置为改变选择性透过的激光束的第二部分的路径，以将选择性透过的激光束的第二部分照射到处理目标上；第一光学系统，选择性透过的激光束的第一部分穿过镜单元并被投射到第一光学系统；以及第二光学系统，选择性透过的激光束的第二部分穿过镜单元并被投射到第二光学系统。
摘要（英）：

A laser irradiation apparatus is provided. The laser irradiation apparatus includes a laser beam generator configured to generate laser beams; a slit unit configured to selectively transmit the laser beams; a mirror unit configured to change a path of the selectively transmitted laser beams, so as to irradiate the selectively transmitted laser beams onto a processing target; a first optical system, wherein a first portion of the selectively transmitted laser beams penetrates through the mirror unit and is projected to the first optical system; and a second optical system, wherein a second portion of the selectively transmitted laser beams penetrates through the mirror unit and is projected to the second optical system.

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