The invention discloses a formation method of a miniature energy storage device electrode. The method comprises the following steps: making a graphical miniature masking plate; providing a substrate, and preparing an electrode slurry; placing the miniature masking plate on the substrate; carrying out atomization spraying on the substrate covered by the miniature masking plate with the electrode slurry; and separating the miniature masking plate from the substrate, and drying the electrode slurry to form a graphical electrode layer on the substrate. The formation method of the miniature energy storage device electrode makes the electrode layer have a complicate and fine shape and a very high precision through a miniature masking plate technology; the electrode slurry is uniformly sprayed on the surface of the substrate through a spraying technology, so the thickness of the finally formed electrode layer is uniform; and the formation method of the miniature energy storage device electrode has the advantages of simple technologies, low cost, and easy large-scale popularization. The invention also discloses the miniature energy storage device electrode, a miniature energy storage device and a formation method of the device.