The invention provides an on-chip switch step-by-step control circuit and method and an on-chip signal pin drive circuit. The on-chip switch step-by-step control circuit at least comprises a switch tube module, a control end drive module and a delay chain; the switch tube module at least comprises n stages of switch tubes connected in parallel, the control end drive module at least comprises n stages of drivers, the output end of each driver is connected with the control end of the corresponding switch tube to be used for driving the corresponding switch tube, and the delay chain at least comprises n-1 stages of delay modules in series, wherein the input end of the first stage of delay module and the input end of the first stage of driver are jointly connected into a control logic input signal, and the output end of the (n-1)th stage of delay module is connected with the input end of the nth driver. By means of the on-chip switch step-by-step control circuit, the current change rate can be effectively reduced; in addition, on the premise that the current change rate is equally reduced, the shortest closing or opening process is achieved, and the switching speed can be maximized.