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发明公开
CN104583699A 带有用于工件的过程腔的设备 有权

带有用于工件的过程腔的设备
摘要：
本发明涉及一种带有过程腔(5)的设备(1)，过程腔包括带有用于工件(3)的容纳区域(15)的内部空间(39)。过程腔(5)具有用于输入或输出工件(3)的开口(12、14)。过程腔(5)带有用于将气态流体吹入内部空间(39)的机构(17、19、25、29、33、37、35)地构造，该机构具有至少一个喷嘴(17、19)或孔口用于在开口(12、14)与用于工件(3)的容纳区域(15)之间产生流体流幕帘(21、23)。过程腔(5)具有用于输入新鲜空气的装置(74)，利用该装置可以在流体流幕帘(21、23)的背离开口(12、14)的一侧上将新鲜空气导入到容纳区域(15)中。
摘要（英）：

The invention relates to a system (1), comprising a process chamber (5), which comprises an interior (39) having an accommodating region (15) for workpieces (3). The process chamber (5) has an opening (12, 14) for supplying or removing workpieces (3). The process chamber (5) is formed with a device (17, 19, 25, 29, 33, 37, 35) for blowing gaseous fluid into the interior (39), which device has at least one nozzle (17, 19) or orifice for producing a fluid flow curtain (21, 23) between the opening (12, 14) and the accommodating region (15) for workpieces (3). The process chamber (5) has an apparatus (74) for supplying fresh air, by means of which fresh air can be introduced into the accommodating region (15) on a side of the fluid flow curtain (21, 23) facing away from the opening (12, 14).

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