The invention discloses a self-cooled anode plasma source comprising a cathode, an anode and a shell. The cathode and the anode are fixed to two ends of the shell, respectively; the cathode, the anode and the shell form a gas passage; the anode is internally provided with a cooling passage and is further provided with a gas inlet and a gas outlet both communicated with the cooling passage; the cooling passage is communicated with the gas passage through the gas outlet; the gas passage is communicated with an arc passage of the anode. When the self-cooled anode plasma source runs, working gas passes the cooling passage and the gas passage in order and enters the arc passage. The self-cooled anode plasma source has the advantages that the anode can self-cool through the working gas, the temperature of the working gas entering the arc passage is increased so that heat efficiency of the self-cooled anode plasma source is improved, and interior and exterior working gas pressures of the arc passage can be balanced, thus stabilizing plasma jets.