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发明授权
CN104641187B 液体供给系统 有权

液体供给系统
摘要：
本发明提供一种液体供给系统，用以抑制溢流阀功能的下降，而且提高冷却效率。该液体供给系统具有：密闭容器(110)；泵(120)，其配置在收容于密闭容器(110)内的超低温液体(L)中，由线性执行机构(130)驱动；第1配管(K1)，其将由泵(120)送出的超低温液体(L)向设置在密闭容器(110)的外部的被冷却装置(300)引导；第2配管(K2)，其使超低温液体(L)从被冷却装置(300)返回至密闭容器(110)内部；溢流阀(170)，其在密闭容器(110)内与第1配管(K1)连接，且使超低温液体(L)溢流到密闭容器(110)内。
摘要（英）：

Provided is a liquid supply system that can suppress a functional decline of relief valves and improve cooling efficiency. The system is characterized by including a sealed container (110), a pump (120) disposed in a cryogenic liquid (L) contained inside the sealed container (110) and driven by a linear actuator (130), a first conduit (K1) for directing the cryogenic liquid (L) pumped out by the pump (120) to a cooled device (300) provided outside the sealed container (110), a second conduit (K2) for returning the cryogenic liquid (L) from the cooled device (300) into the sealed container (110), and a relief valve (170) that is connected to the first conduit (K1) within the sealed container (110) and releases the cryogenic liquid (L) into the sealed container (110).

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