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发明公开
CN104655684A 微流量传感器及其制造与使用方法 无效 - 驳回

微流量传感器及其制造与使用方法
摘要：
一种微流量传感器，包括覆盖层、电极层及隔离层，所述电极层包括基板以及沉积于基板上的至少一电极，所述至少一电极的厚度小于10μm，所述隔离层设置于电极层与覆盖层之间，隔离层上形成有至少一流道用于容纳液体，其制造与使用方法包括：提供一基板并在所述基板上沉积导电材料形成至少一厚度小于10μm电极；提供一隔离层并将所述隔离层的第一表面贴附于基板上，所述隔离层形成有至少一流道横跨所述至少一电极；以及提供一覆盖层并将所述覆盖层贴附于所述隔离层的第二表面，本发明微流量传感器电极的厚度小于10μm，为液体在流道内的流动留出了更多的空间，降低了其对液体流动的影响，从而得到更为准确的检测结果。
摘要（英）：

Provided is a microfluidic sensor including a coverage layer, an electrode layer, and an isolation layer, the electrode layer includes a substrate and at least one electrode deposited on the substrate, the thickness of the at least one electrode is smaller than 10 mum, the isolation layer is arranged between the electrode layer and the coverage layer, and at least one flow is formed on the isolation layer to receive liquid. The method for manufacturing and using the microfluidic sensor includes providing a subtrate, depositing conductive materials on the substrate to form at least one electrode having a thickness less than 10 mum, providing an isolation layer and attaching the first surface of the isolation layer to the substrate, wherein the isolation layer is provided with at least one channel crossing the at least one electrode, providing a coverage layer and attaching the coverage layer to the second surface of the isolation. The thickness of the electrode of the microfluidic sensor is less than 10 mum to save more space for the flowing of liquid in the channel, so that the influnece to the liquid flowing is reduced, and the accurate detection result is obtained.

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