利索-全球专利检索

  1. 登录
  2. 注册
发明授权
CN104813456B 接合工具冷却装置及接合工具的冷却方法 有权

接合工具冷却装置及接合工具的冷却方法
摘要：
一种接合工具冷却装置(10)，其设在接合载台附近，并具备：框架(12)；以及冷却构件(16)，包含具有接合工具(61)的前端面接地的接地面(14a)的接地板(14)、及安装在接地板(14)的与接地面(14a)相反侧的面的散热片(15)；冷却构件(16)是通过支承机构(200)以绕沿着接地面(14a)的X轴、与沿着接地面(14a)的Y轴的二个轴旋转自如的方式支承于框架(12)。由此，可缩短接合工具的冷却时间。
摘要（英）：

A bonding tool cooling apparatus (10) provided in the vicinity of a bonding stage, including a frame (12); a cooling member (16) including a ground plate (14) having a ground surface (14a) on which a front edge surface of a bonding tool (61) is grounded, and a heat radiation fin (15) attached to an opposite surface of the ground plate (14) to the ground surface (14a), wherein the cooling member (16) is supported on the frame (12) by a support mechanism (200) so that the cooling member (16) is rotatable about two axes, i.e., an X axis extending along the ground surface (14a) and a Y axis extending along the ground surface (14a). Bonding tool cooling time can be thereby reduced.

公开/授权文献
0/0