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发明授权
CN104937698B 透光型压印用模具、大面积模具的制造方法 失效 - 权利终止

透光型压印用模具、大面积模具的制造方法
摘要：
本发明提供一种压印方法，其具备：曝光工序，在向涂布于大面积基材上的光固化性树脂按压透光型压印用模具的状态下，以使照射到通过为使透明基材的凹凸图案再现而设置的遮光部件(5)而固化的遮光区域的光固化性树脂的光量少于照射到位于遮光区域以外的透光区域的光固化性树脂的光量的方式向光固化性树脂照射固化光，由此使位于所述遮光区域的光固化性树脂(9b)半固化；脱离工序，在曝光工序后使模具从光固化性树脂脱离；移动工序，接下来，模具的透光区域的端部以位于半固化而成的光固化性树脂(9b)上的方式使模具移动；反复工序，在移动后的位置进行曝光工序和脱离工序。
摘要（英）：

An imprint method including the steps of: an exposing step to irradiate a photo curing resin, coated on a large-area substrate, with a curing light while the light-transmitting imprint mold is pressed against the photo curing resin, an amount of the curing light applied onto the photo curing resin in a light shielding region provided with the light shielding member (5) made less than an amount of the curing light applied onto the photo curing resin in a light transmitting region of the mold so that a portion of the photo curing resin in the light shielding region is semi-cured by the use of the light shielding member (5) provided so as to reproduce the concave-convex pattern of the transparent substrate; a separating step to separate the mold from the photo curing resin after the exposing step; a moving step to move the mold so that an end of the light transmitting region of the mold is positioned on the semi-cured portion (9b) of the photo curing resin; and a repeating step to repeat the exposing step and the separating step with the mold positioned at a position after the moving step.

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