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发明公开
CN104965390A 一种运送多个基板依次通过曝光机的方法和系统 无效 - 驳回

一种运送多个基板依次通过曝光机的方法和系统
摘要：
本发明涉及一种运送多个基板依次通过曝光机的方法和应用本发明方法的系统。本发明的方法包括：将所述的多个基板依次涂覆湿式光致抗蚀物质；将涂好的基板依次送入由一对聚酯薄膜所形成的封装承运区，于所述封装承运区的起点，所述的薄膜被施加到基板的两面上，以对所述基板进行封装；封装后的基板被所述聚酯薄膜依次运至曝光机进行曝光；曝光后的基板于所述封装承运区的终点依次被脱掉所述聚酯薄膜。本发明具有生产效率高、通用性好、生成成本较低等优点。
摘要（英）：

The present invention relates to a method for transporting a plurality of substrates to sequentially pass through an exposure machine, and a system applying the method. The method comprises: sequentially coating a wet photoresist material on the plurality of the substrates; sequentially feeding the coated substrates into a packaging carrying region formed from a pair of polyester films, and applying the films onto both surfaces of the substrates at the starting point of the packaging carrying region so as to package the substrates; sequentially transporting the packaged substrates to the exposure machine through the polyester films to carry out exposure; and sequentially removing the polyester films from the substrates being subjected to the exposure at the ending point of the packaging carrying region. The method and the system of the present invention have advantages of high production efficiency, good versatility, low generation cost and the like.

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