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CN105051815A 热辅助磁头检查装置以及热辅助磁头检查方法 无效 - 撤回

热辅助磁头检查装置以及热辅助磁头检查方法
摘要：
热辅助磁头检查装置(1)具备：磁头磁场检测系统(36、37)，其根据悬臂(10)的位移量测定热辅助磁头(11)所产生的磁场；近场光检测系统(20)，其根据在悬臂位置产生的散射光测定热辅助磁头(11)所产生的近场光；光学系统工作台(2)，其搭载近场光检测系统，在二维方向上移动；以及图像显示部，其通过照相机(35)拍摄悬臂和热辅助磁头的位置关系来进行显示。在更换了悬臂时，控制部(4)参照图像显示部计算悬臂的更换造成的位置偏离量，使光学系统工作台(2)移动计算出的位置偏离量。由此，在测定由热辅助磁头产生的磁场和近场光的情况下，即使在更换悬臂时产生位置偏离也会自动地对其进行调整。
摘要（英）：

A heat-assisted magnetic head inspection device (1) comprises a head magnetic field detection system (36, 37) that measures a magnetic field generated by a heat-assisted magnetic head (11) from the amount of displacement of a cantilever (10), a near field light detection system (20) that measures the near field light generated by the heat-assisted magnetic head (11) from the scattered light issued at the cantilever position, an optical system stage (2) on which the near field light detection system is mounted and moved in two dimensions, and an image display unit that displays the positional relationship of the cantilever and the magnetic head by imaging with a camera (35). When the cantilever is replaced, a control unit (4) references the image display unit and calculates the amount of positional shift due to the replacement of the cantilever, and then moves the optical system stage (2) by the calculated amount of positional shift. Thus, when measuring the magnetic field and the near field light generated by the heat-assisted magnetic head, the positional shift is automatically adjusted even if positional shift occurs during cantilever replacement.

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