The invention provides a preparation method of corrugated graphene. The method comprises the steps that a catalytic substrate is provided, the catalytic substrate is put into a growth chamber, a carbon source is introduced into the growth chamber, the catalytic substrate is heated to a preset temperature, and the graphene is obtained by growing on the surface of the catalytic substrate; under the non-oxidizing protective atmosphere, the cooling rate is adjusted, and the surface of the graphene is made to appear corrugation with preset height, width and density. According to the preparation method of the corrugated graphene, the catalytic substrate, for example, semiconductor material germanium including the germanium, germanium on an insulator, epitaxial germanium on bulk silicon and epitaxial germanium on a three-five family, is taken as a catalyst, the graphene is prepared on the surface of the catalytic substrate through the gas-state or solid-state carbon source, under the protection of the non-oxidizing atmosphere, the cooling rate is adjusted to range from 200 DEG C/min to 1 DEG C/min, the shape such as the height and the width and the density of the corrugation of the surface of the prepared graphene can be conveniently and efficiently controlled, and the prepared corrugated graphene has important application in the fields of sensors, flexible electronic devices, biology and the like.