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发明授权
CN105093785B 晶圆级硅基液晶投影组件、系统与方法 有权

晶圆级硅基液晶投影组件、系统与方法
摘要：
本发明的题目是一种晶圆级硅基液晶投影组件、系统与方法。晶圆级硅基液晶投影组件包括一硅基液晶显示器以及一偏振分光层。硅基液晶显示器以空间调变入射于硅基液晶显示器的光线。偏振分光层以导引至硅基液晶显示器或从硅基液晶显示器出来的光线。晶圆级硅基液晶投影系统的组装方法包括：将一偏振分光晶圆设置于一有源矩阵晶圆上，有源矩阵晶圆包括多个有源矩阵以定义多个液晶显示像素。组装方法还包括：设置一透镜晶圆于偏振分光晶圆上，透镜晶圆包括多个透镜。一种晶圆级偏振分光器的组装方法包括：接合一偏振分光晶圆与至少另一晶圆以形成一堆叠晶圆，偏振分光晶圆包括一偏振分光层，偏振分光层包括多个偏振分光膜带。
摘要（英）：

A wafer-level liquid-crystal-on-silicon (LCOS) projection assembly includes a LCOS display for spatially modulating light incident on the LCOS display and a polarizing beam-separating (PBS) layer for directing light to and from the LCOS display. A method for fabricating a LCOS projection system includes disposing a PBS wafer above an active-matrix wafer. The active-matrix wafer includes a plurality of active matrices for addressing liquid crystal display pixels. The method, further includes disposing a lens wafer above the PBS wafer. The lens wafer includes a plurality of lenses. Additionally, a method for fabricating a wafer-level polarizing beam includes bonding a PBS wafer and at least one other wafer to form a stacked wafer. The PBS wafer includes a PBS layer that contains a plurality of PBS film bands.

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