The invention provides a space charge density measuring apparatus based on a probe array. The measuring apparatus comprises a sensing unit, a processing unit and a pedestal, wherein the processing unit is arranged below the sensing unit and is connected with the pedestal; the sensing unit utilizes a probe array; and the probe array comprises an array framework and potential probes. The invention provides a space charge density measuring apparatus based on a probe array, and can acquire the space potential based on the probe array, and can utilize the Gauss theorem to calculate the charge density of the space; and the potential probes are induction type or vibration type so that the measurement accuracy and the stability of the apparatus can be improved and the apparatus can be preferably applied to a complex and changeable environment.