Provided are a sterilization apparatus including a sterilization chamber, a vacuum pump connected to one side of the sterilization chamber, a vaporizer connected to another side of the sterilization chamber, and a collector having one side connected to the vaporizer and the other side connected to the sterilization chamber and a sterilization method using the sterilization apparatus. In the sterilization apparatus and the sterilization method, a hydrogen peroxide solution having a concentration of 95wt% or higher may be obtained through multiple concentration steps and used as a sterilant, thereby considerably improving a sterilization effect.