The present invention discloses a fluorine-containing naphthalene ethyl silicon resin, a preparation method and applications thereof. According to the present invention, a fluorine-containing naphthalene ethyl organosilicon monomer, alkyl trichlorosilane and alkyl dichlorosilane are adopted as starting raw materials, a condensation reaction is performed to prepare a sol, the obtained sol solution is coated on a silicon wafer in a spin-coating manner, and heating is performed to cure so as to form a film to obtain the fluorine-containing naphthalene ethyl silicon resin, or the film is annealed so as to further improve the electrical properties of the fluorine-containing naphthalene ethyl silicon resin. According to the present invention, the comprehensive performances of the fluorine-containing naphthalene ethyl silicon resin can be changed by changing the ratio of the fluorine-containing naphthalene ethyl organosilicon monomer to the alkyl trichlorosilane to the alkyl dichlorosilane, such that the fluorine-containing naphthalene ethyl silicon resin meets different requirements of people on the low dielectric constant materials; the dielectric constant of the fluorine-containing naphthalene ethyl silicon resin can achieve 2.0-2.5, such that the fluorine-containing naphthalene ethyl silicon resin can be adopted as the low dielectric constant material of the extremelt large scale integrated circuit with less than or equal to 45 nm; and the preparation method of the fluorine-containing naphthalene ethyl silicon resin is simple, and the industrial production is easily achieved.