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发明授权
CN105424767B 湿度传感器芯片大批量生产的测试装置及测试方法 有权

湿度传感器芯片大批量生产的测试装置及测试方法
摘要：
本发明提供了一种湿度传感器芯片大批量生产的测试装置及测试方法，包括测量腔、温度传感器、已校准的湿度传感器、Load Board测试子板、Load Board测试母板和测试机；其中，所述温度传感器、所述已校准的湿度传感器和所述Load Board测试子板设置在所述测量腔内；所述已校准的湿度传感器和所述温度传感器设置在所述Load Board测试子板上；所述Load Board测试母板电连接所述Load Board测试子板；所述测试机电连接所述Load Board测试母板；本发明无需恒温、恒湿条件，不需要复杂的辅助设备，也节约了达到恒温、恒湿所需要的等待时间。
摘要（英）：

The invention provides a humidity-sensor-chip mass production testing device and method. The testing device comprises a testing cavity, a temperature sensor, a calibrated humidity sensor, a Load Board testing secondary board, a Load Board testing primary board and a testing machine. The temperature sensor, the calibrated humidity sensor and the Load Board testing secondary board are arranged in the testing cavity. The calibrated humidity sensor and the temperature sensor are arranged on the Load Board testing secondary board. The Load Board testing primary board is electrically connected with the Load Board testing secondary board. The testing machine is electrically connected with the Load Board testing primary board. According to the humidity-sensor-chip mass production testing device and method, the constant-temperature condition and the constant-humidity condition are avoided, complex auxiliary devices are avoided, and the waiting time required for achieving the constant temperature and the constant humidity is also saved.

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