The invention discloses a vacuum glass plasma cleaning method which comprises the steps of 1) enabling two exciting electrodes connected with an exciting power source to act on the vacuum glass; 2) pumping a vacuum chamber through an extraction opening of the vacuum glass till the set pressure is achieved; 3) opening the exciting power source, so as to enable the generated plasmas to bombard the inner surface of the glass and the inner surface of an emulation layer and to remove the organic pollutants adsorbed on the inner surface of the glass and the inner surface of the emulation layer; 4) pumping away the air generated from bombardment in the step 3); 5) repeating the steps from 2 to 4; and 6) continuously vacuumizing till a set vacuum value is achieved, and sealing the extraction opening to achieve the vacuum glass manufacturing. According to the cleaning method provided by the invention, the vacuumizing speed of vacuum glass is increased, the production efficiency is improved, the vacuum degree of the vacuum glass is improved, and the service life of the vacuum glass is prolonged. The invention further discloses a vacuum glass plasma cleaning device.