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发明公开
CN105603400A ZnO透明导电薄膜的制备方法 无效 - 驳回

ZnO透明导电薄膜的制备方法
摘要：
本发明涉及透明导电薄膜的技术领域，公开了ZnO透明导电薄膜的制备方法，包括以下制备步骤：a)、以Zn(Ac)2·2H2O，Al(NO3)3·9H2O，FeCl3·6H2O为原材料，乙二醇甲醚为溶剂，乙醇胺为稳定剂，配置溶胶；b)、对玻璃基底进行清洗；c)、采用旋涂法在玻璃基底上旋涂成膜；放置在150℃～250℃的烘箱中热处理9min～11min，自然冷却到室温，再重复多次旋涂溶胶成膜；d)、将步骤c)制得的薄膜进行热处理，得到ZnO透明导电薄膜。ZnO透明导电薄膜的制备方法采用溶胶凝胶法合成ZnO透明导电薄膜，具有操作简单、经济便捷以及实现大规模化生产等优点，且制得的ZnO透明导电薄膜均匀。
摘要（英）：

The invention relates to the technical field of transparent conductive films and discloses a preparation method of a ZnO transparent conductive film. The preparation method includes the steps of a, using Zn(Ac)2.2H2O, Al(NO3)3.9H2O and FeCl3.6H2O as raw materials, ethylene glycol monomethyl ether as solvent, ethanolamine as stabilizer to prepare sol; b, cleaning a glass substrate; c, using a spin-coating method to form a film on the glass substrate; heating in a drying oven of 150-250 DEG C for 9-11 minutes, naturally cooling to room temperature, and repeatedly spin coating the sol for multiple times to form a film; d, performing thermal treatment on the film obtained in the step c to obtain the ZnO transparent conductive film. The preparation method using a sol-gel method to synthesize the ZnO transparent conductive film has the advantages that the method is simple to operate, economical and convenient, capable of achieving large-scale production, and the like, and the prepared ZnO transparent conductive film is uniform.

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