The invention relates to an X-ray irradiation method for ionization irradiation of components. The method relates to an irradiation device composed of an X-ray tube, a collimator, a beam limiting plate, a low-energy scattering filter, an electric three-dimensional platform, an irradiation platform, a laser indicator and a water circulating inlet/outlet; and the method realizes continuous adjustment of energy and dose of X-rays and continuous adjustment of irradiation beam spots, can eliminate the influence of low-energy scattering on the irradiation result, and provides a relatively ideal condition for ionization irradiation of components. The method provides a convenient, fast and low-cost ionization irradiation condition for ionization total dose irradiation effect research and test evaluation of components, and is significant for promoting the basic supporting capability of radiation reinforcement of electronic components.