The invention relates to a diffusion source coating device. The diffusion source coating device is used for coating a sample and comprises a rotary mechanism, a fixed frame, a support and a nozzle array, wherein the rotary mechanism is connected with the fixed frame; the support is connected with the rotary mechanism; the nozzle array is connected with the support and comprises a plurality of nozzles arranged on the support. When the diffusion source coating device is used for coating the sample, the rotary mechanism drives the support to rotate to enable the nozzles on the support to rotationally perform diffusion source coating on the sample. According to the diffusion source coating device, the coating effect and the processing efficiency can be improved, diffusion source materials are saved and the process cost is lowered.