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发明授权
CN106091910B 膜厚的检测装置 有权

膜厚的检测装置
摘要：
本申请提供了一种膜厚的检测装置。该检测装置包括公共单元与检测单元，公共单元包括至少一个公共电极，其中，该检测单元包括：至少一个传感器芯片，各传感器芯片与公共单元在第一方向上相对且间隔设置，公共单元与各传感器芯片之间的间隔构成待测膜的传输通道，各传感器芯片包括至少一行沿第二方向排列的多个检测电极，第二方向与待测膜的移动方向垂直，第一方向与第一平面垂直，第一平面与第二方向平行，各传感器芯片用于感应公共电极上的电信号并输出；信号处理单元，与各传感器芯片电连接，对各传感器芯片输出的电信号进行处理并输出。该检测装置能够灵活调整膜厚的检测装置的精确度，能够获得更高的检测精度。
摘要（英）：

A device for detecting a film thickness, comprising a common unit (1) and a detection unit (2). The common unit (1) comprises at least one common electrode (11), and the detection unit (2) comprises at least one sensor chip (21) and signal processing unit (23). Each of the sensor chips (21) is opposite to and spaced apart from the common unit (1) in a first direction.The spaces between the common unit (1) and the sensor chips (21) form a transport channel of a film under test. The sensor chips (21) comprise at least one row of multiple detection electrodes (211) arranged in a second direction. The second direction is perpendicular to a moving direction of the film under test. The first direction is perpendicular to a first plane, and the first plane is parallel to the second direction. The sensor chips (21) are used to sense and output an electrical signal of the common electrode (11). The signal processing unit (23) is electrically connected to the sensor chips (21), and processes and outputs an electrical signal outputted by the sensor chips (21).

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