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发明授权
CN106142528B 压印方法以及压印装置 有权

压印方法以及压印装置
摘要：
本发明的目的在于提高压印的脱模性并使微小图案的转印品质稳定。其特征在于，包括：树脂涂敷工序，在将基板(21)的背面贴附于粘贴片材(28)的状态下，以覆盖基板的表面且在基板的外周伸出而与粘贴片材接触的方式涂敷光固化树脂(22)；预先固化工序，通过从基板的背面侧照射光，使与粘贴片材接触的光固化树脂固化；加压工序，将在模具(24)上形成的微小图案按压于基板的表面上的光固化性树脂；固化工序，通过从基板的表面侧照射光，使基板的表面上的光固化树脂固化；以及脱模工序，通过从在粘贴片材上发生了固化的位置进行剥离，将模具从光固化树脂脱模。
摘要（英）：

An imprinting method includes a resin application process of applying a light curing resin so that the resin covers a surface of the substrate and protrudes from an outer periphery of the substrate to contact an adhesive sheet in a state where a reverse surface of the substrate is adhered to the adhesive sheet, an advance curing process of curing the light curing resin contacting the adhesive sheet by irradiating the substrate with light from the reverse surface side, a pressurizing process of pressing a fine pattern formed in a mold onto the light curing resin on the surface of the substrate, a curing process of curing the light curing resin on the surface of the substrate by irradiating the substrate with light from the surface side and a mold releasing process of releasing the mold from the light curing resin by performing peeling from a portion cured on the adhesive sheet.

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