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CN106165061B 用于激光维持等离子体的横向泵激的系统及方法 有权

用于激光维持等离子体的横向泵激的系统及方法
摘要：
一种用于横向等离子体泵激的激光维持等离子体光源包含：泵激源，其经配置以产生泵激照明；一或多个照明光学元件；及气体围阻结构，其经配置以围阻一定体积的气体。所述一或多个照明光学元件经配置以通过沿着泵激路径将泵激照明引导到所述气体围阻结构的所述气体体积内的一或多个焦斑而在所述气体体积内维持等离子体。一或多个收集光学元件经配置以沿着收集路径收集由所述等离子体发射的宽带辐射。此外，所述照明光学元件经配置以界定所述泵激路径，使得泵激照明沿着横向于所述收集路径的所述所发射宽带光的传播方向的方向照射所述等离子体，使得所述泵激照明基本上从所述所发射宽带辐射解耦。
摘要（英）：

A laser-sustained plasma light source for transverse plasma pumping includes a pump source configured to generate pumping illumination, one or more illumination optical elements and a gas containment structure configured to contain a volume of gas. The one or more illumination optical elements are configured to sustain a plasma within the volume of gas of the gas containment structure by directing pump illumination along a pump path to one or more focal spots within the volume of gas. The one or more collection optical elements are configured to collect broadband radiation emitted by the plasma along a collection path. Further, the illumination optical elements are configured to define the pump path such that pump illumination impinges the plasma along a direction transverse to a direction of propagation of the emitted broadband light of the collection path such that the pump illumination is substantially decoupled from the emitted broadband radiation.

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