The invention provides a surface temperature real-time measurement method in the optical film damage process. The method includes the steps of (1) adjusting the optical path and irradiating the laser having a wavelength of Lambda 1 on a sample to be tested; (2) by means of the mobile adjusting structure of a lens, making the laser having the wavelength of Lambda 1 irradiated on the sample to be tested have proper light spot size; (3) carrying out the measurement of nanosecond pulse laser induced optical film damage: starting a first laser, a second laser, a mobile platform, an energy meter, and a CCD online damage determination device to determine whether the sample to be tested is damaged or not; and (4) performing the measurement of the surface temperature in the damage process: by means of the CCD online damage determination device, starting a third laser, and making the detection laser having the wavelength of Lambda 3 and the main laser having the wavelength of Lambda 1 irradiate on the sample to be tested at a certain angle, and meanwhile, adjusting two Si avalanche photodiode detectors and an oscilloscope and recording the thermoreflectance signals of the surface of the sample to be tested to determine the temperature change of the sample surface in the damage process under the irradiation of the main laser.