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发明授权
CN107046228B 一种电吸收调制激光器及其制备方法 有权

一种电吸收调制激光器及其制备方法
摘要：
本发明提供一种电吸收调制激光器及其制备方法。本发明提供的电吸收调制激光器包括SiO2‑Si‑Metal复合衬底、调制‑激光模块、绝缘层和金属电极层；所述SiO2‑Si‑Metal复合衬底具有夹心结构，包括分布于硅片两面的金属层和SiO2层；所述调制‑激光模块的总腔长为30～600μm，横截面直径为0.8～5μm，包括分布于一条直线上的调制区和激光区，具有量子阱结构；所述激光区包括两个法布里‑波罗腔；所述调制‑激光模块分布于SiO2层上表面，量子阱结构平行于复合衬底；所述绝缘层分布于SiO2层上表面，并且覆盖调制‑激光模块；所述金属电极层覆盖于绝缘层表面与调制区对应的部分，体积小，集成度高。
摘要（英）：

The invention provides an electroabsorption modulated laser and a method for preparing the same. The electroabsorption modulated laser comprises a SiO2-Si-Metal composite substrate, a modulation-laser module, an insulating layer and a metal electrode layer. The SiO2-Si-Metal composite substrate having a sandwich structure consists of a metal layer and a SiO2 layer distributed at the two sides of a silicon wafer. The total length of the modulation-laser module is 30 to 600 microns and the cross-sectional diameter is 0.8 to 5 microns; the modulation-laser module includes a modulation region and a laser region that are distributed at one straight line and has a quantum well structure; the laser region includes two Fabry-Perot cavities; and the modulation-laser module is distributed at the upper surface of the SiO2 layer and the quantum well structure is parallel to the composite substrate. The insulating layer is distributed at the upper surface of the SiO2 layer and covers the modulation-laser module. And the metal electrode layer covers the portion, corresponding to the modulation region, of the surface of the insulating layer. The laser has advantages of small size and high integration.

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