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发明公开
CN107084817A 防水部件、防水部件的制造方法、压力传感器及电子模块 无效 - 撤回

防水部件、防水部件的制造方法、压力传感器及电子模块
摘要：
本发明提供一种能够容易地赋予防水性能的防水部件、防水部件的制造方法、压力传感器及电子模块。防水部件(1)具有：层压体(2)，其具备第二硅层(23)以及第二氧化硅层(24)；贯穿孔(3)，其被设置在层压体(2)上，并阻止液体的通过且容许气体的通过，贯穿孔(3)具有第一贯穿孔(31)和第二贯穿孔(32)，第一贯穿孔(31)贯穿第二硅层(23)，第二贯穿孔(32)贯穿第二氧化硅层(24)且与第一贯穿孔(31)连通，第二贯穿孔(32)的宽度与第一贯穿孔(31)的宽度相比较小。
摘要（英）：

The invention provides a waterproof member, manufacturing method of waterproof member, a pressure sensor, and an electronic module. The waterproof member includes a laminated body including a second silicon layer and a second silicon oxide layer, and a through hole that is provided in the laminated body, prevents passing of liquid, and allows passing of gas, the through hole includes a first through hole that passes through the second silicon layer, and a second through hole passing through the second silicon oxide layer and communicating with the first through hole, and a width of the second through hole is smaller than a width of the first through hole.

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