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发明公开
CN107210186A 用于使用单端红外发射体将红外辐射注入到真空处理室中的辐照装置 失效 - 权利终止

用于使用单端红外发射体将红外辐射注入到真空处理室中的辐照装置
摘要：
本发明涉及一种用于将红外辐射注入到真空处理室中的辐照装置，其具有单端红外发射体(1)，所述单端红外发射体(1)包括呈圆玻璃管形式的发射体壳体管(2)，所述单端红外发射体(1)的一个封闭端突出到所述真空处理室中，且所述单端红外发射体(1)具有真空馈通体(3)以用于固持所述发射体壳体管并以气密方式引导所述发射体壳体管穿过所述真空处理室中的开口，其中所述发射体壳体管中布置有呈加热细丝(6)的形式的加热导体及呈电流回路的形式的回路导体(7)，其中所述加热导体在所述发射体壳体管的环绕所述真空馈通体的部分中具有从所述发射体壳体管引出的连接元件(12)。为尤其确保甚至在高加热输出的情况下且在无额外组件或冷却情况下的长IR发射体的安全操作，根据本发明提出将所述加热导体的所述连接元件(12)引导穿过一个管(11)且所述回路导体在所述发射体壳体管(2)的环绕所述真空馈通体(3)的所述部分中具有用于补偿热膨胀的装置(例如弹簧元件(14)或滑动轴承(15))。
摘要（英）：

The invention relates to an irradiating device for injecting infrared radiation into a vacuum process chamber, with a single-ended infrared emitter (1), which comprises an emitter casing tube (2) in the form of a round glass tube, one closed end of which protrudes into the vacuum process chamber, and with a vacuum feedthrough (3) for holding the emitter casing tube and leading it in a gas-tight manner through an opening in the vacuum process chamber, wherein a heating conductor in the form of a heating filament (6) and a return conductor (7) in the form of a current return are arranged in the emitter casing tube, wherein the heating conductor has in the portion of the emitter casing tube that is surrounding the vacuum feedthrough a connection element (12), which is led out from the emitter casing tube. To ensure safe operation, in particular of long IR emitters, even with a high heating output and without additional components or cooling, it is proposed according to the invention that the connection element (12) of the heating conductor is led through a piece of pipe (11) and that the return conductor has in the portion of the emitter casing tube (2) that is surrounding the vacuum feedthrough (3) a means for compensating the thermal expansion (such as a spring element (14) or a sliding bearing (15)).

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