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发明授权
CN107240570B 晶圆转向装置 有权

晶圆转向装置
摘要：
一种晶圆转向装置包括一壳体、一转向件和一晶圆载具。壳体包括一壳体内置空间与一壳体外表面。转向件连接壳体外表面，用以使壳体旋转。晶圆载具承载于壳体内置空间，用以收容至少一晶圆。在转向件使壳体旋转，以翻转收容至少一晶圆的晶圆载具时，晶圆载具的摆放方式会对应得由平放或直放之间改变，使得晶圆载具和至少一晶圆可以一起从壳体内置空间内被取出。
摘要（英）：

The invention discloses a wafer turning device comprising a housing, a turning member, and a wafer carrier. The housing comprises housing built-in space and a housing outer surface. The turning member is connected with the housing outer surface, and is used to realize the rotation of the housing. The wafer carrier is disposed in the housing built-in space, and is used to accommodate at least one wafer. When the housing is rotated under the driving of the turning member to overturn and accommodate the wafer carrier of at least one wafer, the arrangement way of the wafer carrier is changed from being arranged horizontally to vertically, and the wafer carrier and the at least one wafer are taken out of the housing built-in space.

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