The invention relates to a state monitoring method for a laser annealing machine. The method comprises: a particle level of a monitoring sheet on a laser annealing machine is measured to obtain a particle value before measurement; the monitoring sheet is scanned by first laser; the particle level of the monitoring sheet is measured to obtain a particle value after measurement; the particle value before measurement is compared with the particle value after measurement to determine a cleaning degree inside a platform of the laser annealing machine; with a rapid laser annealing method, the monitoring sheet is annealed; too much boron is injected into the monitoring sheet; the monitoring sheet is scanned by second laser; the monitoring sheet is monitored to obtain a measurement value of a square resistance value; and the square resistance value is compared with a preset value to obtain a difference so as to determine whether stability of the laser temperature meets the standard. According to the invention, particle level measurement and square resistance measurement can be carried out on the same monitoring sheet to determine whether the cleaning degree inside the platform of the laser annealing machine and the stability of the laser temperature meet the standards. Therefore, usage of the monitoring sheets is reduced; and the manufacturing cost is lowered while the monitoring effect is not affected.