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CN107356269A 经应力及温度补偿的霍尔传感器及方法 有权

经应力及温度补偿的霍尔传感器及方法
摘要：
一种用于测量磁场强度的集成半导体设备(100、200、1500)，包括：霍尔传感器(11)、具有第一应力灵敏度(SS1)和第一温度灵敏度(TS1)的第一侧向各向同性传感器(21)、具有第二应力灵敏度(SS2)和第二温度灵敏度(TS2)的第二侧向各向同性传感器(31)、任选的放大装置(13)、数字化装置(14)；以及计算装置，其被配置成基于可被表示成仅含两个参数(Δσiso、ΔT或V1、V2)的n阶多项式的预定义的公式来在数字域中计算经应力和温度补偿的霍尔值(VHcomp)。这些参数(V1、V2)可直接从传感器元件被获得，或者它们(Δσiso、ΔT)可根据两个联立方程的组被计算出。一种获得霍尔电压信号并且针对应力和温度漂移补偿所述信号的方法。
摘要（英）：

An integrated semiconductor device (100, 200, 1500) for measuring a magnetic field, comprising: a Hall sensor (11), a first lateral isotropic sensor (21) having a first stress sensitivity (ss1) and a first temperature sensitivity (TS1), a second lateral isotropic sensor (31) having a second stress sensitivity (SS2) and a second temperature sensitivity (TS2), optional amplifying means (13), digitization means (14); and calculation means configured for calculating a stress and temperature compensated Hall value in the digital domain, based on a predefined formula which can be expressed as an n-th order polynomial in only two parameters ([delta][sigma]iso, [delta]T, V1 or V2). These parameters may be obtained directly from the sensor elements, or they may be calculated from a set of two simultaneous equations. A method of obtaining a Hall voltage signal, and compensating said signal for stress and temperature drift.

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