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CN107434239A 一种可应用于人工耳蜗的MEMS薄膜电极阵列及加工方法 无效 - 驳回

一种可应用于人工耳蜗的MEMS薄膜电极阵列及加工方法
摘要：
本发明公开了一种可应用于人工耳蜗的MEMS薄膜电极阵列与加工方法。包括：所述薄膜电极阵列采用直线型结构，薄膜平面内电极形状为圆形，垂直于平面方向电极具有凸起形状；薄膜电极阵列内电极的尺寸根据人工耳蜗激励电流要求与电极材料电荷密度安全值设计，其中，电极中心间距≥150μm，每个电极暴露面积直径≥70μm。本发明引入MEMS微加工技术，提升了电极阵列的电极密度，降低了手工加工的加工成本。
摘要（英）：

The invention discloses an MEMS membrane electrode array applicable to artificial cochlea and a processing method of the MEMS membrane electrode array. A linear-type structure is adopted in the membrane electrode array, the electrode in the membrane plane is circular, and the electrode perpendicular to the direction of the plane is in a protrusion shape; the size of the electrodes in the membrane electrode array is designed according to the requirement of the artificial cochlea for the excitation current and the electricity charge density safety value of the electrode material, wherein the electrode center-to-center spacing is larger than or equal to 150 micrometers, and the diameter of the exposed area of each electrode is larger than or equal to 70 micrometers. An MEMS micromachining technology is introduced, the electrode density of the electrode array is increased, and the processing cost of hand finishing is lowered.

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