The invention provides an evaporation machine table device. The evaporation machine table device comprises at least two substrate cleaner units, normal-pressure cavities and a vacuum cavity assembly, wherein the normal-pressure cavities are arranged between the substrate cleaner units and the vacuum cavity assembly and comprise the normal-pressure metal mask plate compensating test cavity and the normal-pressure metal mask plate loading cavity. The evaporation machine table device has the beneficial effects that when an evaporation machine table is switched between the normal operation mode and the metal mask plate compensating test operation mode, the evaporation machine table device can directly perform metal mask plate compensating test operation in the normal-pressure cavities, substrates do not need to wait for conversion between the atmosphere environment and the vacuum environment of a certain cavity, time of the mask plate compensating test operation is greatly shortened, the time of effective operation, like product or component manufacturing of the evaporation machine table is prolonged, the working efficiency of an evaporation line is improved, and meanwhile the vacuum resource of the machine table is saved.