The invention discloses a distributed improvement control method of electron beam purification equipment. The method comprises the following steps: (1) distributed disposition; (2) collection of basicparameters; (3) planning of an electron beam path; and (4) distributed algorithm control. Each piece of electron beam purification equipment is controlled through a distributed automatic control algorithm to move independently. Through collection of basic parameters, planning of an electron beam path and finally distributed algorithm control, basic parameter information is sent to a central control center and a refining scheme is made, thereby improving the quality of products and guaranteeing the output of products.