The invention provides a thermal deformation compensation method. The thermal deformation compensation method comprises the steps that the thermal displacement of at least two axial positions on a rod-shaped object at two or more different temperatures is obtained; the thermal expansion zero point is determined according to the thermal displacement of the at least two axial positions on the rod-shaped object at the two or more different temperatures, and is the position where the approximate linear relation exists between the temperature variable quantity and the thermal displacement of the rod-shaped object; the thermal displacement of the thermal expansion zero point under the specific temperature variable quantity is determined; the error compensation quantity of the rod-shaped object is determined according to the thermal displacement of the thermal expansion zero point under the specific temperature variable quantity; and thermal deformation of the rod-shaped object is compensatedaccording to the error compensation quantity.