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发明公开
CN107806818A 一种金刚石刀具刃口轮廓质量超精密测量装置 无效 - 驳回

一种金刚石刀具刃口轮廓质量超精密测量装置
摘要：
本发明公开了一种金刚石刀具刃口轮廓质量超精密测量装置，该装置的左右移动导轨A、上下移动导轨A、前后移动导轨用于实现原子力扫描头与金刚石刀具十微米量级的偏心调整；左右移动导轨B、前后移动导轨B用于实现光学显微镜与金刚石刀具十微米量级的偏心调整；三维精密位姿调整机构用于实现金刚石刀具与原子力扫描探针亚微米量级的偏心调整；超精密空气静压回转轴系用于实现金刚石刀具全刃口锋利度和圆弧波纹度的测量。本发明的金刚石刀具刃口轮廓质量超精密测量装置能够有效控制超精密轴系的振动和回转误差对测量结果的影响，同时显著提升金刚石刀具刃口锋利度、圆弧波纹度、刃口微豁、刃口表面粗糙的测量效率。
摘要（英）：

The invention discloses a diamond cutter cutting edge contour quality ultra-precision measurement device. A left-right moving guide rail A, an up-and-down moving guide rail A and a front-rear moving guide rail of the device are used for achieving ten-micron eccentric adjustment of an atomic force scanning head and a diamond cutter; a left-right moving guide rail B and a front-rear moving guide rail B are used for achieving ten-micron eccentric adjustment of an optical microscope and the diamond cutter; a three-dimensional precision pose adjusting mechanism is used for achieving submicron eccentric adjustment of the diamond cutter and an atomic force scanning probe; and an ultra-precision air static pressure rotary shaft is used for achieving measurement of a diamond cutter full cutting edge sharpness and arc waviness. The diamond cutter cutting edge contour quality ultra-precision measurement device can effectively control the influence of the vibration of an ultra-precision shaft androtation errors on measurement results, and the diamond cutter cutting edge sharpness, arc waviness, cutting edge micro openings and cutting edge surface roughness measurement efficiency are remarkably improved.

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