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发明公开
CN107966088A 一种气体分配器孔径检验工装 审中-实审

一种气体分配器孔径检验工装
摘要：
本发明公开了一种气体分配器孔径检验工装，包括定位底板，以及连接在定位底板上的检验上板；所述的定位底板中间部位设置有开口；所述的检验上板上设置有若干个用于放置气体分配器的通孔；所述的开口的面积大于通孔的面积；通过定位底板连接检测设备，进一步将检验上板通过定位销定位在定位底板，再通过螺栓连接紧固，进一步在通孔上安装气体分配器，进行检测，不但保证了检测的精度，而且能够多个气体分配器同时进行检测，操作方便，检测效率高。
摘要（英）：

The invention discloses a gas distributor aperture detection tooling, which comprises a positioning base plate and an detection upper plate connected on the positioning base plate, wherein the positioning base plate is provided with an opening in the middle part; a plurality of through holes used for accommodating gas distributors are formed in the detection upper plate; and the area of the opening is greater than that of the through holes. The gas distributor aperture detection tooling is connected with detection equipment by means of the positioning base plate, further the detection upper plate is positioned on the positioning base plate by means of positioning pins and then fastened through bolt connection, and the gas distributors are installed in the through holes for detection, thusthe detection precision is ensured, the plurality of gas distributors can conduct detection simultaneously, the operation is convenient, and the detection efficiency is high.

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