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发明授权
CN108048807B 具有抗菌生物活性MoO3-SiO2纳米晶复合涂层的制备方法 有权 转让

具有抗菌生物活性MoO3-SiO2纳米晶复合涂层的制备方法
摘要：
本发明公开一种具有抗菌生物活性MoO3‑SiO2纳米晶复合涂层的制备方法，涉及双阴极等离子溅射沉积和离子氧化复合工艺以及涂层材料的结构设计与选材领域；本发明采用的双阴极等离子溅射沉积技术参数为：靶材电压800V~1000V,工件电压250V~350V，靶材与工件间距10mm~20mm,工作气压25Pa~40Pa，沉积温度750℃~950℃，沉积时间3.0h~5.0h；采用的离子氧化工艺参数为：靶材电压650~750V，工件电压250V~350V，靶材与工件间距10mm~20mm，工作气压25Pa~40Pa，O2分压0.1Pa~1.0Pa，氧化试剂1.0h~2.0h；工件材料为海洋船体用各类不锈钢；本发明方法制备的MoO3‑SiO2纳米晶复合涂层具有高硬度、高韧性以及优异的腐蚀抗力和抗微生物腐蚀能力，能明显提高用于海洋船体用各类不锈钢的耐磨性、抗腐蚀性能和抗菌性能。
摘要（英）：

The invention discloses a preparation method of an MoO3-SiO2 nanocrystalline composite coating with antibacterial bioactivity, and relates to the composite process of double-cathode plasma sputteringdeposition and ion oxidation and the field of structural design and selection of coating materials. The technical parameters of the double-cathode plasma sputtering deposition are characterized in that the target material voltage is 800 V-1000 V, the workpiece voltage is 250 V-350 V, the distance between a target material and a workpiece is 10 mm-20 mm, the working air pressure is 25 Pa-40 Pa, thedeposition temperature is 750 DEG C-950 DEG C, and the deposition time is 3.0 h-5. 0 h; the parameters of the adopted ion oxidation process are characterized in that the target material voltage is 650 V-750 V, the workpiece voltage is 250 V-350 V, the distance between the target material and the workpiece is 10 mm-20 mm, the working air pressure is 25 Pa-40 Pa, the oxygen partial pressure is 0.1Pa-1.0 Pa, and the oxidation time is 1.0 h-2.0 h; and the workpiece is made of various stainless steel for marine hulls. The MoO3-SiO2 nanocrystalline composite coating prepared by the method has highhardness, high toughness and excellent corrosion resistance and microbial corrosion resistance, and can obviously improve the wear resistance, the corrosion resistance and the antibacterial propertyof the various stainless steel for the marine hulls.

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