利索-全球专利检索

  1. 登录
  2. 注册
发明公开
CN108098590A 一种研磨抛光垫的修整器及其修整方法 审中-实审 转让

一种研磨抛光垫的修整器及其修整方法
摘要：
本发明公开了一种研磨抛光垫的修整器和修整方法，该修整器包括至少一个修整轮，所述修整轮由驱动装置驱动旋转，通过所述修整轮的修整面对待修整的研磨抛光垫进行修整，所述修整轮的修整面上设置有至少一个金刚石修整区域和至少一个毛刷区域。本发明可以克服因脱落的金刚石颗粒残留于抛光垫的表面而造成产品表面的刮伤等问题，提高被修整产品的良率。
摘要（英）：

The invention discloses a dresser for a grinding and polishing pad and a dressing method. The dresser comprises at least one dressing wheel. The dressing wheels are driven by a driving device to rotate. The dressing surfaces of the dressing wheels are used for dressing the grinding and polishing pad to be dressed. The dressing surface of each dressing wheel is provided with at least one diamond dressing area and at least one hairbrush area. By means of the dresser for the grinding and polishing pad and the dressing method, the problem that the product surface can be scratched due to the fact that dropping diamond particles residue on the surface of the polishing pad can be solved, and the yield of dressed products is increased.

0/0