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发明公开
CN108204807A 用于微机电系统(MEMS)装置的弯曲联接器 有权

用于微机电系统(MEMS)装置的弯曲联接器
摘要：
本公开涉及用于微机电系统(MEMS)装置的弯曲联接器。微机械惯性装置呈现为具有通过联接器耦合在一起的多个线性移动质量块，当耦合的质量块呈现线性反相运动时，联接器以线性方式移动。一些所述的联接器是弯曲的，并提供了耦合的质量块的两个运动自由度。一些这样的联接器位于耦合的质量块之间。在耦合的质量块的线性反相运动期间，使用布置成在线性相反方向上移动的多个联接器提供动量平衡操作。
摘要（英）：

Micromachined inertial devices are presented having multiple linearly-moving masses coupled together by couplers that move in a linear fashion when the coupled masses exhibit linear anti-phase motion. Some of the described couplers are flexural and provide two degrees of freedom of motion of the coupled masses. Some such couplers are positioned between the coupled masses. Using multiple couplers which are arranged to move in linearly opposite directions during linear anti-phase motion of the coupled masses provides momentum-balanced operation.

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