The invention relates to an MEMS sensor for parallel detection of two-dimensional physical quantities. The two-dimensional physical quantities refer to micro sound and temperature, the MEMS sensor comprises a micro sound sensor and a temperature sensor; the two sensors are connected in parallel, and the micro sound sensor is a micro sound sensor of which the quantity of cantilever beams is greaterthan one. According to the MEMS sensor provided by the invention, the long-term stable operation of photoacoustic spectrometry is facilitated by adopting the cantilever beams of a multi-beam structure, the characteristic that cantilever beams with different sensitivities have different strength and hardness can be utilized, and when the cantilever beam with higher sensitivity is broken due to a too high sound pressure, other cantilever beams can still be selected as micro sound sensors to be continuously detected, so as to realize unification of the sensitivity and reliability of the sensor.Moreover, due to fusion of the temperature sensor, the error of the temperature on detection of the cantilever beam micro sound sensor is eliminated, and the photoacoustic spectrometry detection accuracy is improved.