The invention discloses a low-delay network service request deployment method. The method includes the steps of converting a user service request into a workflow model network service request; when aprocessed set is non-empty and a VNF therein is a source point, deploying the source point at a specified location; when the processed set is non-empty and the VNF therein is not a source point, and if a parent VNF of the VNF of the processed set has been deployed, storing the corresponding VNF into a ready-to-process set; selecting the VNF in the ready-to-process set as the VNF to be deployed, determining whether an underlying node capable of deploying the VNF to be deployed is in the underlying network, and if so, deploying the VNF to be deployed on the underlying node and storing the VNF toa deployed set; when the processed set has been traversed, deleting all VNFs in the processed set and the ready-to-process set that are the same as those in the deployed set, and emptying the deployed set; when the deleted VNFs are not destination points, adding child VNFs thereof to the processed set; and when the processed set is empty, outputting a deployment plan.