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发明授权
CN108279553B 一种光刻机照明控制测试系统及方法 有权

一种光刻机照明控制测试系统及方法
摘要：
本发明公开了一种光刻机照明控制测试系统及方法，控制测试系统包括功能控制模块、性能测试与处理模块、报告生成模块和安全监测模块；测试方法包括对光场性能和光瞳性能进行测试及处理，并将处理结果传输给控制中心模块；根据性能测试与处理结果，生成测试报告，并传输给控制中心模块；对气压信号和互锁信号进行监测，并传输给控制中心模块；接收控制中心模块的指令并执行等步骤。本发明能够快速高效地完成照明系统性能指标测试，并同时自动化给出测试报告，极大提高了集成装调过程的迭代速度。
摘要（英）：

The invention discloses an illumination control testing system and method of a lithography machine. The control testing system comprises a function control module, a performance testing and processingmodule, a report generation module and a safety monitoring module; the testing method comprises the following steps: testing and processing light field performance and pupil performance; transmittinga processing result to a control center module; generating a testing report according to a performance testing and processing result and transmitting the testing report to the control center module;monitoring a gas pressure signal and an interlocking signal and transmitting the signals to the control center module; receiving an instruction of the control center module and executing and the like.The illumination control testing system and method can be used for rapidly and efficiently finishing an illumination system performance index test and automatically giving the testing report at the same time, so that the iteration speed of an integrated alignment process is extremely improved.

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