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发明公开
CN108369384A 具有灵活性的照射器 审中-实审

具有灵活性的照射器
摘要：
公开了一种方法，包括将辐射束分割成具有第一偏振的所述辐射束的第一部分和具有第二偏振的所述辐射束的第二部分；形成具有在该第一偏振与该第二偏振之间的第一偏振分布的第一束和/或通过调制所述束的第一部分而具有第一强度分布的第一束；形成具有在该第一偏振与该第二偏振之间的第二偏振分布的第二束和/或通过调制所述束的第二部分而具有第二强度分布的第二束；以及组合具有第二偏振的所述第一束的至少一部分与具有第一偏振的所述第二束的至少一部分。
摘要（英）：

A method is disclosed that includes splitting a beam of radiation into a first part of the beam having a first polarization and a second part of the beam having a second polarization, forming a first beam with a first polarization distribution between the first polarization and the second polarization and/or a first intensity distribution by modulating the first part of the beam, forming a second beam with a second polarization distribution between the first polarization and the second polarization and/or a second intensity distribution by modulating the second part of the beam, and combining at least a portion of the first beam having the second polarization and at least a portion of the second beam having the first polarization.

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