The invention provides a processing method of microwave control chips. According to the method, firstly, a precise photolithography technology is utilized to prepare a high-precision substrate die; secondly, a deep etching technology is used for forming a substrate mold. The substrate mold is covered with a metal layer, and a precise electroforming technology is utilized to process a high-precision metal mold. Then, an integrated precise injection-molding technique is utilized to obtain a micro-channel chip with same concavity and convexity as a photoresist mold. According to the method, a micro-processing technology based on photolithography, etching and electroforming is combined with an injection-molding technology used in the industry for the first time, precise molds are used for conducting processing on the microwave control chips made of thermal plastic materials at different channel altitudes, and batched processing of the microwave control chips with high productivity and a low cost is achieved.