The invention provides an on-chip boost voltage source circuit. The circuit comprises a reference circuit module, an oscillator module, a charge pump module and a current leakage voltage stabilizer module; an output end of the reference circuit module is connected with an input end of the current leakage voltage stabilizer module and provides reference voltage for the current leakage voltage stabilizer module, an output end of the oscillator module is connected with an input end of the charge pump module and provides a clock signal for the charge pump module, and the charge pump module is connected with the output of the current leakage voltage stabilizer module to serve as an output voltage source. The circuit is simple, effective, small in layout area and low in cost. Through the parallel connection work of two charge pumps, the output ripples are small; by utilizing the negative feedback of an error operational amplifier, the high-precision output voltage can be achieved; by utilizing pre-conducted leakage current, the power-on overshoot voltage is greatly reduced.