The invention discloses an ICF (inertial confinement fusion) target assembly parameter measuring multi-freedom degree precision motion platform device. The ICF target assembly parameter measuring multi-freedom degree precision motion platform device comprises four parts, namely an ICF target parameter measuring three-dimensional translation system, an ICF target parameter three-dimensional monitoring system, an ICF target attitude double-rotation precision adjustment system and a vibration isolating platform for bearing the former three systems, wherein the ICF target parameter measuring three-dimensional translation system, the ICF target parameter three-dimensional monitoring system and the ICF target attitude double-rotation precision adjustment system are mounted on the vibration isolating platform in a delta form. Through combination with a high-precision air-floating guide rail and an air-floating shaft system and structural optimization and integration, high-precision adjustmentof ICF target space attitude is achieved; the designed motion platform with the ability of outputting target coordinate parameters completes precision adjustment and control of the overall target space attitude through cooperation with other projects, so that measurement of geometric quantities such as the size and the shape accuracy of microspheres, microcylinders and ICF target assembly parameters can be achieved.