The invention relates to a solid-state micro supercapacitor and a manufacturing method thereof. The device is provided with a planar structure electrode. Compared with a conventional sandwich structure supercapacitor, the solid-state micro supercapacitor is greatly improved in planar integration and meets requirements for small size and high portability. The specific process of the manufacturing method of the solid-state micro supercapacitor includes the following steps that: with a mask adopted, a pulsed laser deposition (PLD) method is adopted to deposit a current collector on a substrate; an electrode material is deposited on the current collector; a solid-state electrolyte is injected, package is carried out, and therefore, the solid-state micro supercapacitor can be obtained. With themanufacturing method of the solid-state micro supercapacitor adopted, planar structure controllable, electrode composition and structure easily adjustable and simple-process micro supercapacitor manufacturing can be realized.