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发明公开
CN108572042A 压力传感器及其制造方法、压力传感器模块、电子设备及移动体 无效 - 撤回

压力传感器及其制造方法、压力传感器模块、电子设备及移动体
摘要：
本发明提供一种能够发挥优异的压力检测精度的压力传感器、压力传感器的制造方法、压力传感器模块、电子设备及移动体。压力传感器具有：基板，其具有通过受压而发生挠曲变形的隔膜；侧壁部，其被配置于所述基板的一面侧，并在俯视观察时包围所述隔膜；密封层，其以隔着空间而与所述隔膜对置的方式被配置，并对所述空间进行密封，所述密封层具有：第一硅层，其具有面对所述空间的贯穿孔；氧化硅层，其相对于所述第一硅层位于与所述空间相反的一侧，并对所述贯穿孔进行密封；第二硅层，其相对于所述氧化硅层而位于与所述空间相反的一侧。
摘要（英）：

A pressure sensor capable of achieving excellent pressure detection precision, a manufacturing method thereof, a pressure sensor module, an electronic apparatus, and a vehicle are provided. The pressure sensor includes a substrate which has a diaphragm that is flexurally deformed by receiving a pressure, a side wall section which is placed on one surface side of the substrate and surrounds the diaphragm in a plan view, and a sealing layer which is placed so as to face the diaphragm through a space and seals the space, wherein the sealing layer includes a first silicon layer which has a through-hole facing the space, a silicon oxide layer which is located on the opposite side to the space with respect to the first silicon layer and seals the through-hole, and a second silicon layer which islocated on the opposite side to the space with respect to the silicon oxide layer.

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